J Macioszczyk, K Malecha, LJ Golonka, J Atkinson… – Microelectronics …, 2016
Purpose
The purpose of this paper is a presentation of a miniature vertical DBD (dielectric barrier discharge) plasma generators. The presented devices, with sub- and superstrate, was made using LTCC (low temperature co-fired ceramics). Such construction allowed to measure discharge spectra and device temperature easily.
Design/methodology/approach
The generators were made in the DuPont 951 system with silver vertical metallizations and PdAg contacts. The devices had electrodes with different width and height. Also distance between them could be established. They were placed on substrate with buried temperature sensor and covered with a ceramic lid. The lid had opening to measure emitted light. Different configurations of vertical DBD were tested.
Findings
Geometry of vertical metallizations influence on spectra, as well as distance between them. Signal to noise ratio had maximum for certain generators and can be measured by the intensity of highest peak.
Research limitations/implications
Height of vertical metallizations are limited by the difference in shrinkage of LTCC tape and via paste. Parameters of temperature sensors vary between measurements, according to rapid changes of temperature and presence of strong electric field.
Practical implications
The generators can be used for creating discharge for optical emission spectrometry (OES). It is convenient method to determine amount of selected gas compounds.
Originality/value
This paper shows fabrication and performance of the novel vertical DBD generators with ceramic additions for convenient spectra measurement and monitoring temperature of the device during work.
… As a reference we used data obtained from vertical DBD generator presented in (Macioszczyk et al., 2015). Spectra were recorded using StellarNet SILVER-Nova spectrometer. We provided our measurements in the full range (from 190 nm to 1110 nm) with 0.5 nm resolution. …
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