Performing a Measurement

Performing a Measurement

  1. This section assumes that the Recipe Creation and Signals Processing sections have already been reviewed and followed. A recipe has been created for the film stack, the signal is optimized to the substrate, and the spectrum is in Reflectance Mode.
  2. Click Load Recipe.
  3. Choose the appropriate recipe for your material. Click Open to load the recipe.
  4. Physically switch from the substrate/reference sample to the coated sample to be tested and click Measure Thickness in the Data Table or click Capture button to perform a measurement.
  5. There are dropdown options to perform either Reflectance or Transmittance measurement and another dropdown options to display the calculated results in Nanometer or Angstroms.
  6. The software will collect the next scan from the spectrometer, calculate the film thickness for each layer, calculate the r^2 value (Goodness of fit) for the calculation, and display both the model simulated material and real data collected from the spectrometer overlayed on the Reflectance graph.
  7. Next, data can be saved by clicking on the Save icon.
  8. Choose a location, name the sample, and then click “Save” to save the data to the file system. .
    • 3 files will be saved:
      • A PDF test report with the user account name, time-stamp, and calculated values.
      • The raw Scope Mode data (.SSM) in ASCII formatted space delimited text.
      • The Transmission/Reflectance Mode (.TRM) data in ASCII formatted space delimited text.

 

 

 

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